青岛育豪微电子设备有限公司

Tel:400-0532-778
Diffusion furnace

Program-controlled diffusion furnace

Program-controlled diffusion furnace
Product Details:

Product description :
Diffusion furnace cater mostly to semiconductor power electronic device industry, high power integrated circuits and other industries, the processed wafer diffusion, oxidation, annealing, alloy technology. Mainly by diffusion furnace, gas furnace heating systems, control systems, ultra clean operating system and other components. Selection of industrial computer-controlled or programmed operation.

Main technical index:
★ Handle wafer size: 2-8 inches
★ Type forms: horizontal 1-4 tube structure
?? operating temperature: 200 c-1300 c
★ Heated length and accuracy: 200mm-1100mm ≤ ± 0.5 ℃
?? single point temperature stability, repeatability: ≤ ± 0.5 ℃/24h
★ Temperature deviation: controllable heating rate 20 ° c/min,
★ Controlled cooling rate: 5 c/min
★ Chip device: the automatic push-pull cantilever boat, lever is push-pull boats, manual push-pull
★ Pneumatic system: process gas/1-5 Road tube
★ Gas control: automatic MFC, manual Rotary flow meter
★ Control: IPC, touch screen

热门标签:Program-controlled diffusion furnace
Feedback
Contact Us

Qingdao Yu hao microelectronics equipment co, Ltd (Headquarters)
Address: liuting industrial zone, Chengyang district, Qingdao City, Xie Rong road, 3rd
Toll free phone: 400-0532-778
Office phone: 13805320424
Website:http://www.tjfny888.com
Email:qdyuhaodz@126.com

Qingdao Yu hao microelectronics equipment co  Mobile

Solar diffusion furnace , diffusion furnace , chain sintering furnace , chain tunnel furnace , high temperature brazing furnace , high temperature sintering furnace , vacuum oven , vacuum tube furnace

无锡兴祥冶金机械厂 济宁卓力工矿设备有限公司 淄博群强电热元件有限公司 无锡半山工程机械制造有限公司 沧州奥林匹斯数控机床配件制造有限公司 连云港端峰生物科技有限公司 烟台昌隆化工有限公司 河南森沃环保科技有限公司 深圳海尔家电维修 广东博晟铝瓶有限公司