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Diffusion furnace type description

编辑:Qingdao Yu hao microelectronics equipment co  时间:2016-02-02

Diffusion furnace vertical diffusion furnace (vertical) and horizontal diffusion furnace (horizontal) two types.

Vertical diffusion furnace

Vertical diffusion furnace quartz boat perpendicular to the horizontal plane, more robot friendly shipping wafer, chip technology parameter consistency is better.

Horizontal diffusion furnace quartz boat parallel to the horizon, a 4 or more than 4 technology of furnace tubes, tube covers an area of smaller on average, between process parameters of vertical diffusion furnace is better.


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